Shape Memory Alloy Actuators And Methods Thereof

ABSTRACT

SMA actuators and related methods are described. One embodiment of an actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator attached to the base.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority from U.S. Provisional PatentApplication No. 62/502,568, filed on May 5, 2017 and U.S. ProvisionalPatent Application No. 62/650,991, filed on Mar. 30, 2018, each of whichis hereby incorporated by reference in its entirety.

FIELD

Embodiments of the invention relate to the field of shape memory alloysystems. More particularly, embodiments of the invention relate to thefield of shape memory allow actuators and methods related thereto.

BACKGROUND

Shape memory alloy (“SMA”) systems have a moving assembly or structurethat for example can be used in conjunction with a camera lens elementas an auto-focusing drive. These systems may be enclosed by a structuresuch as a screening can. The moving assembly is supported for movementon a support assembly by a bearing such as plural balls. The flexureelement, which is formed from metal such as phosphor bronze or stainlesssteel, has a moving plate and flexures. The flexures extend between themoving plate and the stationary support assembly and function as springsto enable the movement of the moving assembly with respect to thestationary support assembly. The balls allow the moving assembly to movewith little resistance. The moving assembly and support assembly arecoupled by four shape memory alloy (SMA) wires extending between theassemblies. Each of the SMA wires has one end attached to the supportassembly, and an opposite end attached to the moving assembly. Thesuspension is actuated by applying electrical drive signals to the SMAwires. However, these type of systems are plagued by the complexity ofthe systems that result in bulky systems that require a large foot printand a large height clearance. Further, the present systems fails toprovide high Z-stroke range with a compact, low profile footprint

SUMMARY

SMA actuators and related methods are described. One embodiment of anactuator includes a base; a plurality of buckle arms; and at least afirst shape memory alloy wire coupled with a pair of buckle arms of theplurality of buckle arms. Another embodiment of an actuator includes abase and at least one bimorph actuator including a shape memory alloymaterial. The bimorph actuator attached to the base.

Other features and advantages of embodiments of the present inventionwill be apparent from the accompanying drawings and from the detaileddescription that follows.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present invention are illustrated by way of exampleand not limitation in the figures of the accompanying drawings, in whichlike references indicate similar elements and in which:

FIG. 1a illustrates a lens assembly including an SMA actuator configuredas a buckle actuator according to an embodiment;

FIG. 1b illustrates an SMA actuator according to an embodiment;

FIG. 2 illustrates an SMA actuator according to an embodiment;

FIG. 3 illustrates an exploded view of an autofocus assembly includingan SMA wire actuator according to an embodiment;

FIG. 4 illustrates the autofocus assembly including a SMA actuatoraccording to an embodiment;

FIG. 5 illustrates an SMA actuator according to an embodiment includinga sensor;

FIG. 6 illustrates a top view and a side view of an SMA actuatorconfigured as a buckle actuator according to an embodiment fitted with alens carriage;

FIG. 7 illustrates a side-view of a section of the SMA actuatoraccording to the embodiment;

FIG. 8 illustrates multiple views of an embodiment of a buckle actuator;

FIG. 9 illustrates a bimorph actuator according to an embodiment with alens carriage;

FIG. 10 illustrates a cutaway view of an autofocus assembly including anSMA actuator according to an embodiment;

FIGS. 11a-c illustrates views of bimorph actuators according to someembodiments;

FIG. 12 illustrates views of an embodiment of a bimorph actuatoraccording to an embodiment;

FIG. 13 illustrates an end pad cross-section of a bimorph actuatoraccording to an embodiment;

FIG. 14 illustrates a center supply pad cross-section of a bimorphactuator according to an embodiment;

FIG. 15 illustrates an exploded view of an SMA actuator including twobuckle actuators according to an embodiment;

FIG. 16 illustrates an SMA actuator including two buckle actuatorsaccording to an embodiment;

FIG. 17 illustrates a side view of an SMA actuator including two buckleactuators according to an embodiment;

FIG. 18 illustrates a side view of an SMA actuator including two buckleactuators according to an embodiment;

FIG. 19 illustrates an exploded view an assembly including an SMAactuator including two buckle actuator according to an embodiment;

FIG. 20 illustrates an SMA actuator including two buckle actuatorsaccording to an embodiment;

FIG. 21 illustrates an SMA actuator including two buckle actuatorsaccording to an embodiment;

FIG. 22 illustrates an SMA actuator including two buckle actuatorsaccording to an embodiment;

FIG. 23 illustrates a SMA actuator including two buckle actuators and acoupler according to an embodiment;

FIG. 24 illustrates an exploded view of an SMA system including an SMAactuator including a buckle actuator with a laminate hammock accordingto an embodiment;

FIG. 25 illustrates an SMA system including an SMA actuator including abuckle actuator 2402 with a laminate hammock according to an embodiment;

FIG. 26 illustrates a buckle actuator including a laminate hammockaccording to an embodiment;

FIG. 27 illustrates a laminate hammock of an SMA actuator according toan embodiment;

FIG. 28 illustrates a laminate formed crimp connection of an SMAactuator according to an embodiment;

FIG. 29 illustrates an SMA actuator including a buckle actuator with alaminate hammock;

FIG. 30 illustrates an exploded view of an SMA system including an SMAactuator including a buckle actuator according to an embodiment;

FIG. 31 illustrates an SMA system including an SMA actuator including abuckle actuator according to an embodiment;

FIG. 32 illustrates an SMA actuator including a buckle actuatoraccording to an embodiment;

FIG. 33 illustrates a two yoke capture joint of a pair of buckle arms ofan SMA actuator according to an embodiment;

FIG. 34 illustrates a resistance weld crimp for an SMA actuatoraccording to an embodiment used to attach an SMA wire to the buckleactuator;

FIG. 35 illustrates an SMA actuator including a buckle actuator with atwo yoke capture joint;

FIG. 36 illustrates a SMA bimorph liquid lens according to anembodiment;

FIG. 37 illustrates a perspective SMA bimorph liquid lens according toan embodiment;

FIG. 38 illustrates a cross-section and a bottom view of SMA bimorphliquid lens according to an embodiment;

FIG. 39 illustrates an SMA system including an SMA actuator with bimorphactuators according to an embodiment;

FIG. 40 illustrates the SMA actuator with bimorph actuators according toan embodiment;

FIG. 41 illustrates the length of a bimorph actuator and the location ofa bonding pad for an SMA wire to extend the wire length beyond thebimorph actuator;

FIG. 42 illustrates an exploded view of an SMA system including anbimorph actuator according to an embodiment;

FIG. 43 illustrates an exploded view of a subsection of the SMA actuatoraccording to an embodiment;

FIG. 44 illustrates a subsection of the SMA actuator according to anembodiment;

FIG. 45 illustrates a 5 axis sensor shift system according to anembodiment;

FIG. 46 illustrates an exploded view of a 5 axis sensor shift systemaccording to an embodiment;

FIG. 47 illustrates an SMA actuator including bimorph actuatorsintegrated into this circuit for all motion according to an embodiment;

FIG. 48 illustrates an SMA actuator including bimorph actuatorsintegrated into this circuit for all motion according to an embodiment;

FIG. 49 illustrates a cross section of a 5 axis sensor shift systemaccording to an embodiment;

FIG. 50 illustrates an SMA actuator according to an embodiment includingbimorph actuators;

FIG. 51 illustrates a top view of an SMA actuator according to anembodiment including bimorph actuators that moved an image sensor indifferent x and y positions;

FIG. 52 illustrates an SMA actuator including bimorph actuatorsaccording to an embodiment configured as a box bimorph autofocus;

FIG. 53 illustrates an SMA actuator including bimorph actuatorsaccording to an embodiment;

FIG. 54 illustrates an SMA actuator including bimorph actuatorsaccording to an embodiment;

FIG. 55 illustrates an SMA actuator including bimorph actuatorsaccording to an embodiment;

FIG. 56 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators;

FIG. 57 illustrates an exploded view of SMA system including a SMAactuator according to an embodiment including bimorph actuatorsconfigured as a two axis lens shift OIS;

FIG. 58 illustrates a cross-section of SMA system including a SMAactuator according to an embodiment including bimorph actuatorsconfigured as a two axis lens shift OIS;

FIG. 59 illustrates a box bimorph actuator according to an embodiment;

FIG. 60 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators;

FIG. 61 illustrates an exploded view of SMA system including a SMAactuator according to an embodiment including bimorph actuators;

FIG. 62 illustrates a cross-section of SMA system including a SMAactuator according to an embodiment including bimorph actuators;

FIG. 63 illustrates box bimorph actuator according to an embodiment;

FIG. 64 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators;

FIG. 65 illustrates an exploded view of a SMA system including a SMAactuator according to an embodiment including bimorph actuators;

FIG. 66 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators;

FIG. 67 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators;

FIG. 68 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators;

FIG. 69 illustrates an exploded view of SMA including a SMA actuatoraccording to an embodiment including bimorph actuators;

FIG. 70 illustrates a cross-section of SMA system including a SMAactuator according to an embodiment including bimorph actuatorsconfigured as a three axis sensor shift OIS;

FIG. 71 illustrates a box bimorph actuator component according to anembodiment;

FIG. 72 illustrates a flexible sensor circuit for use in a SMA systemaccording to an embodiment;

FIG. 73 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators;

FIG. 74 illustrates an exploded view of SMA system including a SMAactuator according to an embodiment including bimorph actuators;

FIG. 75 illustrates a cross-section of SMA system including a SMAactuator according to an embodiment;

FIG. 76 illustrates box bimorph actuator according to an embodiment;

FIG. 77 illustrates a flexible sensor circuit for use in a SMA systemaccording to an embodiment;

FIG. 78 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators;

FIG. 79 illustrates an exploded view of SMA system including a SMAactuator according to an embodiment including bimorph actuators;

FIG. 80 illustrates a cross-section of SMA system including a SMAactuator according to an embodiment;

FIG. 81 illustrates box bimorph actuator according to an embodiment;

FIG. 82 illustrates a flexible sensor circuit for use in a SMA systemaccording to an embodiment;

FIG. 83 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators;

FIG. 84 illustrates an exploded view of SMA system including a SMAactuator according to an embodiment;

FIG. 85 illustrates a cross-section of SMA system including a SMAactuator according to an embodiment including bimorph actuators;

FIG. 86 illustrates box bimorph actuator for use in a SMA systemaccording to an embodiment;

FIG. 87 illustrates a flexible sensor circuit for use in a SMA systemaccording to an embodiment; and

FIG. 88 illustrates exemplary dimensions for a bimorph actuator of anSMA actuator according to embodiments.

DETAILED DESCRIPTION

Embodiments of an SMA actuator are described herein that include acompact footprint and providing a high actuation height, for examplemovement in the positive z-axis direction (z-direction), referred toherein as the z-stroke. Embodiments of the SMA actuator include an SMAbuckle actuator and an SMA bimorph actuator. The SMA actuator may beused in many applications including, but not limited to, a lens assemblyas an autofocus actuator, a micro-fluidic pump, a sensor shift, opticalimage stabilization, optical zoom assembly, to mechanically strike twosurfaces to create vibration sensations typically found in hapticfeedback sensors and devices, and other systems where an actuator isused. For example, embodiments of an actuator described herein could beused as a haptic feedback actuator for use in cellphones or wearabledevices configured to provide the user an alarm, notification, alert,touched area or pressed button response. Further, more than one SMAactuator could be used in a system to achieve a larger stroke.

For various embodiments, the SMA actuator has a z-stroke that is greaterthan 0.4 millimeters. Further, the SMA actuator for various embodimentshas a height in the z-direction of 2.2 millimeters or less, when the SMAactuator is in its initial, a de-actuated position. Various embodimentsof the SMA actuator configured as an autofocus actuator in a lensassembly may have a footprint as small as 3 millimeters greater than thelens inner diameter (“ID”). According to various embodiments, the SMAactuator may have a footprint that is wider in one direction toaccommodate components including, but not limited to, sensors, wires,traces, and connectors. According to some embodiments, the footprint ofan SMA actuator is 0.5 millimeters greater in one direction, for examplethe length of the SMA actuator is 0.5 millimeters greater than thewidth.

FIG. 1a illustrates a lens assembly including an SMA actuator configuredas a buckle actuator according to an embodiment. FIG. 1b illustrates anSMA actuator configured as a buckle actuator according to an embodiment.The buckle actuators 102 are coupled with a base 101. As illustrated inFIG. 1b , SMA wires 100 are attached to buckle actuators 102 such thatwhen the SMA wires 100 are actuated and contract this causes the buckleactuators 102 to buckle, which results in at least the center portion104 of each buckle actuator 102 to move in the z-stroke direction, forexample the positive z-direction, as indicated by the arrows 108.According to some embodiments, the SMA wires 100 are actuated whenelectrical current is supplied to one end of the wire through a wireretainer such as a crimp structure 106. The current flows through theSMA wire 100 heating it due to the resistance inherent in the SMAmaterial of which the SMA wire 100 is made. The other side of the SMAwire 100 has a wire retainer such as a crimp structure 106 that connectsthe SMA wire 100 to complete the circuit to ground. Heating of the SMAwire 100 to a sufficient temperature causes the unique materialproperties to change from martensite to austenite crystalline structure,which causes a length change in the wire. Changing the electricalcurrent changes the temperature and therefore changes the length of thewire, which is used to actuate and de-actuate the actuator to controlthe movement of the actuator in at least the z-direction. One skilled inthe art would understand that other techniques could be used to provideelectrical current to an SMA wire.

FIG. 2 illustrates an SMA actuator configured as an SMA bimorph actuatoraccording to an embodiment. As illustrated in FIG. 2, the SMA actuatorincludes bimorph actuators 202 coupled with a base 204. The bimorphactuators 202 include an SMA ribbon 206. The bimorph actuators 202 areconfigured to move at least the unfixed ends of the bimorph actuators202 in the z-stroke direction 208 as the SMA ribbon 206 shrinks.

FIG. 3 illustrates an exploded view of an autofocus assembly includingan SMA actuator according to an embodiment. As illustrated, an SMAactuator 302 is configured as a buckle actuator according to embodimentsdescribed herein. The autofocus assembly also includes optical imagestabilization (“OIS”) 304, a lens carriage 306 configured to hold one ormore optical lens using techniques including those known in the art, areturn spring 308, a vertical slide bearing 310, and a guide cover 312.The lens carriage 306 is configured to slide against the vertical slidebearing 310 as the SMA actuator 302 moves in the z-stroke direction, forexample the positive z-direction, when the SMA wires are actuated andpull and buckle the buckle actuators 302 using techniques includingthose described herein. The return spring 308 is configured to apply aforce in the opposite direction to the z-stroke direction on the lenscarriage 306 using techniques including those known in the art. Thereturn spring 308 is configured, according to various embodiments, tomove the lens carriage 306 in the opposite direction of the z-strokedirection when the tension in the SMA wires is lowered as the SMA wireis de-actuated. When the tension in the SMA wires is lowered to theinitial value, the lens carriage 306 moves to the lowest height in thez-stroke direction. FIG. 4 illustrates the autofocus assembly includingan SMA wire actuator according to an embodiment illustrated in FIG. 3.

FIG. 5 illustrates an SMA wire actuator according to an embodimentincluding a sensor. For various embodiments, the sensor 502 isconfigured to measure the movement of the SMA actuator in thez-direction or the movement of a component that that SMA actuator ismoving using techniques including those known in the art. The SMAactuator including one or more buckle actuators 506 configured toactuate using one or more SMA wires 508 similar to those describedherein. For example, in the autofocus assembly described in reference toFIG. 4, the sensor is configured to determine the amount of movement thelens carriage 306 moves in the z-direction 504 from an initial positionusing techniques including those known in the art. According to someembodiments, the sensor is a tunnel magneto resistance (“TMR”) sensor.

FIG. 6 illustrates a top view and a side view of an SMA actuator 602configured as a buckle actuator according to an embodiment fitted with alens carriage 604. FIG. 7 illustrates a side-view of a section of theSMA actuator 602 according to the embodiment illustrated in FIG. 6.According to the embodiment illustrated in FIG. 7, the SMA actuator 602includes a slide base 702. According to an embodiment, the slide base702 is formed of metal, such as stainless steel, using techniquesincluding those know in the art. However, one skilled in the art wouldunderstand that other materials could be used to form the slide base702. Further, the slide base 702, according to some embodiments, hasspring arms 612 coupled with the SMA actuator 602. According to variousembodiments, spring arms 612 are configured to serve two functions. Thefirst function is to help push on an object, for example a lens carriage604, into a guide cover's vertical slide surface. For this example, thespring arms 612 preload the lens carriage 604 up against this surfaceensuring that the lens will not tilt during actuation. For someembodiments, the vertical slide surfaces 708 are configured to mate withthe guide cover. The second function of the spring arms 612 is to helppull the SMA actuator 602 back down, for example in the negativez-direction, after the SMA wires 608 move the SMA actuator 602 in thez-stroke direction, the positive z-direction. Thus, when the SMA wires608 are actuated they contract to move the SMA actuator 602 in thez-stroke direction and the spring arms 612 are configured to move theSMA actuator 602 in the opposite direction of the z-stroke directionwhen the SMA wires 608 are de-actuated.

The SMA actuator 602 also includes a buckle actuator 710. For variousembodiments, the buckle actuator 710 is formed of metal, such asstainless steel. Further, the buckle actuator 710 includes buckle arms610 and one or more wire retainers 606. According to the embodimentillustrated in FIGS. 6 and 7, the buckle actuator 710 includes four wireretainers 606. The four wire retainers 606 are each configured toreceive an end of an SMA wire 608 and retain the end of the SMA wire608, such that the SMA wire 608 is affixed to the buckle actuator 710.For various embodiments, the four wire retainers 606 are crimps that areconfigured to clamp down on a portion of the SMA wire 608 to affix thewire to the crimp. One skilled in the art would understand that an SMAwire 608 may be affixed to a wire retainer 606 using techniques known inthe art including, but not limited to, adhesive, solder, andmechanically affixed. The smart memory alloy (“SMA”) wires 608 extendbetween a pair of wire retainers 606 such that the buckle arms 610 ofthe buckle actuator 710 are configured to move when the SMA wires 608are actuated which results in the pair of wire retainers 606 beingpulled closer together. According to various embodiments, the SMA wires608 are electrically actuated to move and control the position of thebuckle arms 610 when a current is applied to the SMA wire 608. The SMAwire 608 is de-actuated when the electrical current is removed or belowa threshold. This moves the pair or wire retainers 606 apart and thebuckle arms 610 move in the opposite direction of that when the SMA wire608 is actuated. According to various embodiments, the buckle arms 610are configured to have an initial angle of 5 degrees with respect to theslide base 702 when the SMA wire is de-actuated in its initial position.And, at full stroke or when the SMA wire is fully actuated the bucklearms 610 are configured to have an angle of 10 to 12 degrees withrespect to the slide base 702 according to various embodiments.

According to the embodiment illustrated in FIGS. 6 and 7, the SMAactuator 602 also includes slide bearings 706 configured between theslide base 702 and the wire retainers 606. The slide bearings 706 areconfigured to minimize any friction between the slide base 702 and abuckle arm 610 and/or a wire retainer 606. The slide bearings for someembodiments are affixed to the slide bearings 706. According to variousembodiments the slide bearings are formed of polyoxymethylene (“POM”).One skilled in the art would understand that other structures could beused to lower any friction between the buckle actuator and the base.

According to various embodiments, the slide base 702 is configured tocouple with an assembly base 704 such as an autofocus base for anautofocus assembly. The actuator base 704, according to someembodiments, includes an etched shim. Such an etched shim may be used toprovide clearance for wires and crimps when the SMA actuator 602 is partof an assembly, such as an autofocus assembly.

FIG. 8 illustrates multiple views of an embodiment of a buckle actuator802 with respect to an x-axis, a y-axis, and a z-axis. As oriented inFIG. 8, the buckle arms 804 are configured to move in the z-axis whenthe SMA wires are actuated and de-actuated as described herein.According to the embodiment illustrated in FIG. 8, the buckle arms 804are coupled with each other through a center portion such as a hammockportion 806. A hammock portion 806, according to various embodiments, isconfigured to cradle a portion of an object that is acted upon by thebuckle actuator, for example a lens carriage that is moved by the buckleactuator using techniques including those described herein. A hammockportion 806 is configured to provide lateral stiffness to the buckleactuator during actuation according to some embodiments. For otherembodiments, a buckle actuator does not include a hammock portion 806.According to these embodiments, the buckle arms are configured to act onan object to move it. For example, the buckle arms are configured to actdirectly on features of a lens carriage to push it upward.

FIG. 9 illustrates an SMA actuator configured as an SMA bimorph actuatoraccording to an embodiment. The SMA bimorph actuator includes bimorphactuators 902 including those described herein. According to theembodiment illustrated in FIG. 9, one end 906 of each of bimorphactuators 902 is affixed to a base 908. According to some embodiments,the one end 906 is welded to base 908. However, one skilled in the artwould understand other techniques could be used to affix the one end 906to the base 908. FIG. 9 also illustrates a lens carriage 904 arrangedsuch that the bimorph actuators 902 are configured to curl in thez-direction when actuated and lift the carriage 904 in the z-direction.For some embodiments, a return spring is used to push the bimorphactuators 902 back to an initial position. A return spring may beconfigured as described herein to aide in pushing the bimorph actuatordown to their initial, de-actuated positions. Because of the smallfootprint of the bimorph actuators, SMA actuators can be made that havea reduced footprint over current actuator technologies.

FIG. 10 illustrates a cutaway view of an autofocus assembly including anSMA actuator according to an embodiment that includes a position sensor,such as a TMR sensor. The autofocus assembly 1002 includes a positionsensor 1004 attached to a moving spring 1006, and a magnet 1008 attachedto a lens carriage 1010 of an autofocus assembly including an SMAactuator, such as those described herein. The position sensor 1004 isconfigured to determine the amount of movement the lens carriage 1010moves in the z-direction 1005 from an initial position based on adistance that the magnet 1008 is from the position sensor 1004 usingtechniques including those known in the art. According to someembodiments, the position sensor 1004 is electrically coupled with acontroller or a processor, such as a central processing unit, using aplurality of electrical traces on a spring arm of a moving spring 1006of an optical image stabilization assembly.

FIGS. 11a-c illustrates views of bimorph actuators according to someembodiments. According to various embodiments, a bimorph actuator 1102includes a beam 1104 and one or more SMA materials 1106 such as an SMAribbon 1106 b (e.g., as illustrated in a perspective view of a bimorphactuator including an SMA ribbon according to the embodiment of FIG. 11b) or SMA wire 1106 a (e.g., as illustrated in a cross-section of abimorph actuator including an SMA wire according to the embodiment ofFIG. 11a ). The SMA material 1106 is affixed to the beam 1104 usingtechniques including those describe herein. According to someembodiments, the SMA material 1106 is affixed to a beam 1104 usingadhesive film material 1108. Ends of the SMA material 1106, for variousembodiments, are electrically and mechanically coupled with contacts1110 configured to supply current to the SMA material 1106 usingtechniques including those known in the art. The contacts 1110 (e.g., asillustrated in FIGS. 11a and 11b ), according to various embodiments,are gold plated copper pads. According to embodiments, a bimorphactuator 1102 having a length of approximately 1 millimeter areconfigured to generate a large stroke and push forces of 50 millinewtons(“mN”) is used as part of a lens assembly, for example as illustrated inFIG. 11c . According to some embodiments, the use of a bimorph actuator1102 having a length greater than 1 millimeter will generate more strokebut less force that that having a length of 1 millimeter. For anembodiment, a bimorph actuator 1102 includes a 20 micrometer thick SMAmaterial 1106, a 20 micrometer thick insulator 1112, such as a polyimideinsulator, and a 30 micrometer thick stainless steel beam 1104 or basemetal. Various embodiments include a second insulator 1114 disposedbetween a contact layer including the contacts 1110 and the SMA material1106. The second insulator 1114 is configured, according to someembodiments, to insulate the SMA material 1106 from portions of thecontact layer not used as the contacts 1110. For some embodiments, thesecond insulator 1114 is a covercoat layer, such a polyimide insulator.One skilled in the art would understand that other dimensions andmaterials could be used to meet desired design characteristics.

FIG. 12 illustrates views of an embodiment of a bimorph actuatoraccording to an embodiment. The embodiment as illustrated in FIG. 12includes a center feed 1204 for applying power. Power is supplied at thecenter of the SMA material 1202 (wire or ribbon), such as that describedherein. Ends of the SMA material 1202 are grounded to the beam 1206 orbase metal as a return path at the end pads 1203. The end pads 1203 areelectrically isolated from the rest of the contact layer 1214. Accordingto embodiments, the close proximity of a beam 1206 or base metal to theSMA material 1202, such as an SMA wire, along the entire length of theSMA material 1202 provides faster cooling of the wire when current isturned off, that is the bimorph actuator is de-actuated. The result is afaster wire deactivation and actuator response time. The thermal profileof the SMA wire or ribbon is improved. For example, the thermal profileis more uniform such that a higher total current can be reliablydelivered to the wire. Without a uniform heat sink, portions of thewire, such as a center region, may overheated and be damaged thusrequiring a reduced current and reduced motion to reliably operate. Thecenter feed 1204 provides the benefits of quicker wireactivation/actuation (faster heating) and reduced power consumption(lower resistance path length) of the SMA material 1202 for fasterresponse time. This allows a faster actuator motion and capability tooperate at a higher movement frequency.

As illustrated in FIG. 12, the beam 1206 includes a center metal 1208that is isolated from the rest of the beam 1206 to form the center feed1204. An insulator 1210, such as those described herein, is disposedover the beam 1206. The insulator 1210 is configured to have one or moreopenings or vias 1212 to provide electrical access to the beam 1206, forexample to couple a ground section 1214 b of the contact layer, and toprovide contact to the center metal 1208 to form the center feed 1204. Acontact layer 1214, such as those described herein, includes a powersection 1214 a and a ground section 1214 b, according to someembodiments, to provide actuation/control signals to the bimorphactuator by way of a power supply contact 1216 and a ground contact1218. A covercoat layer 1220, such as those described herein, isdisposed over the contact layer 1214 to electrically isolate the contactlayer except at portions of the contact layer 1214 where electricalcoupling is desired (e.g., one or more contacts).

FIG. 13 illustrates an end pad cross-section of a bimorph actuatoraccording to an embodiment as illustrated in FIG. 12. As describedabove, the end pad 1203 electrically isolated from the rest of thecontact layer 1214 by way of a gap 1222 formed between the end pad 1203and the contact layer 1214. The gap is formed, according to someembodiments, using etching techniques including those known in the art.The end pad 1203 includes a via section 1224 configured to electricallycouple the end pad 1203 with the beam 1206. The via section 1224 formedin a via 1212 formed in the insulator 1210. The SMA material 1202 iselectrically coupled to the end pad 1213. The SMA material 1202 can beelectrically coupled to the end pad 1213 using technique including, butnot limited to, solder, resistance welding, laser welding, and directplating.

FIG. 14 illustrates a center feed cross-section of a bimorph actuatoraccording to an embodiment as illustrated in FIG. 12. The center feed1204 is electrically coupled with to a power supply through the contractlayer 1214 and electrically and thermally coupled with the center metal1208 by way of a via section 1226 in the center feed 1204 formed in avia 1212 formed in the insulator 1210.

The actuators described herein could be used to form an actuatorassembly that uses multiple buckle and or multiple bimorph actuators.According to an embodiment, the actuators may be stacked on top of eachother in order to increase a stroke distance that can be achieved.

FIG. 15 illustrates an exploded view of an SMA actuator including twobuckle actuators according to an embodiment. Two buckle actuators 1302,1304, according to embodiments described herein, are arranged withrespect to each other to use their motion to oppose each other. Forvarious embodiments, the two buckle actuators 1302, 1304 are configuredto move in an inverse relation to each other to position a lens carriage1306. For example, the first buckle actuator 1302 is configured toreceive an inverse power signal of the power signal sent to the secondbuckle actuator 1304.

FIG. 16 illustrates an SMA actuator including two buckle actuatorsaccording to an embodiment. The buckle actuators 1302, 1304 areconfigured such that the buckle arms 1310, 1312 of each buckle actuator1302, 1304 face each other and the slide base 1314, 1316 of each buckleactuator 1302, 1304 are an outer surface of the two buckle actuators. Ahammock portion 1308 of each SMA actuators 1302, 1304, according tovarious embodiments, is configured to cradle a portion of an object thatis acted upon by the one or more buckle actuators 1302, 1304, forexample a lens carriage 1306 that is moved by the buckle actuators usingtechniques including those described herein.

FIG. 17 illustrates a side view of an SMA actuator including two buckleactuators according to an embodiment that illustrates the direction ofthe SMA wires 1318 that result in moving an object such as a lenscarriage in a positive z direction or in an upwardly direction.

FIG. 18 illustrates a side view of an SMA actuator including two buckleactuators according to an embodiment that illustrates the direction ofthe SMA wires 1318 that result in moving an object such as a lenscarriage in a negative z direction or in an downwardly direction.

FIG. 19 illustrates an exploded view an assembly including an SMAactuator including two buckle actuator according to an embodiment. Thebuckle actuators 1902, 1904 are configured such that the buckle arms1910, 1912 of each buckle actuator 1902, 1904 are an outer surface ofthe two buckle actuators and the slide base 1914, 1916 of each buckleactuator 1902, 1904 face each other. A hammock portion 1908 of each SMAactuators 1902, 1904, according to various embodiments, is configured tocradle a portion of an object that is acted upon by the one or morebuckle actuators 1902, 1904, for example a lens carriage 1906 that ismoved by the buckle actuators using techniques including those describedherein. For some embodiments, the SMA actuator includes a base portion1918 configured to receive the second buckle actuator 1904. The SMAactuator may also include a cover portion 1920. FIG. 20 illustrates anSMA actuator including two buckle actuators according to an embodimentincluding a base portion and a cover portion.

FIG. 21 illustrates an SMA actuator including two buckle actuatorsaccording to an embodiment. For some embodiments, the buckle actuators1902, 1904 are arranged with respect to each other such that the hammockportions 1908 of the first buckle actuator 1902 are rotated about 90degrees from the hammock portions of the second buckle actuator 1904.The 90 degrees configuration enables pitch and roll rotation of anobject, such as a lens carriage 1906. This provides better control overthe movement of the lens carriage 1906. For various embodiments,differential power signals are applied to the SMA wires of each buckleactuator pair, which provides for pitch and roll rotation of the lenscarriage for tilt OIS motion.

Embodiments of the SMA actuators including two buckle actuators removethe need to have a return spring. The use of two buckler actuators canimprove/reduce hysteresis when using SMA wire resistance for positionalfeedback. The opposing force SMA actuators including two buckleractuators aid in more accurate position control due to lower hysteresisthan those including a return spring. For some embodiments, such as theembodiment illustrated in FIG. 22, the SMA actuator including two buckleactuators 2202, 2204 provide 2-axis tilt using differential power to theleft and right SMA wires 2218 a, 2218 b of each buckle actuator 2202,2204. For example, a left SMA wire 2218 a is actuated with higher powerthan a right SMA wire 2218 b. This causes the left side of the lenscarriage 2206 to move down and right side to move up (tilt). The SMAwires of the first buckle actuator 2202 are held at equal power, forsome embodiments, to act as a fulcrum for the SMA wires 2218 a, 2218 bto differentially push against to cause tilt motion. Reversing the powersignals applied to the SMA wires, for example applying equal power tothe SMA wires of the second buckle actuator 2202 and using differentialpower to the left and right SMA wires 2218 a, 2218 b of the secondbuckle actuator 2204 results in a tilt of the lens carriage 2206 in theother direction. This provides the ability to tilt an object, such as alens carrier, in either axis of motion or can tune out any tilt betweenthe lens and sensor for good dynamic tilt, which leads to better picturequality across all pixels.

FIG. 23 illustrates a SMA actuator including two buckle actuators and acoupler according to an embodiment. The SMA actuator includes two buckleactuators such as those described herein. A first buckle actuator 2302is configured to couple with a second buckle actuator 2304 using acoupler, such as a coupler ring 2305. The buckle actuators 2302, 2304are arranged with respect to each other such that the hammock portions2308 of the first buckle actuator 2302 are rotated about 90 degrees fromthe hammock portions 2309 of the second buckle actuator 2304. A payloadfor moving, such as a lens or lens assembly, is attached to a lenscarriage 2306 configured to be disposed on a slide base of first buckleactuator 2302.

For various embodiments, equal power can be applied to the SMA wires ofthe first buckle actuator 2302 and the second buckle actuator 2304. Thiscan result in maximizing the z stroke of the SMA actuator in thepositive z-direction. For some embodiments, the stroke of the SMAactuator can have a z stroke equal to or greater than two times thestroke of other SMA actuators including two buckle actuators. For someembodiments, an additional spring can be added to for the two bucklersto push against to aid in pushing the actuator assembly and the payloadback down when the power signals are removed from the SMA actuator.Equal and opposite power signals can be applied to the SMA wires of thefirst buckle actuator 2302 and the second buckle actuator 2304. Thisenables the SMA actuator to be moved in the positive z-direction by abuckle actuator and to be moved in the negative z-direction by a buckleactuator, which enables accurate control of the position of the SMAactuator. Further, equal and opposite power signals (differential powersignals) can be applied to the left and right SMA wire of the firstbuckle actuator 2302 and the second buckle actuator 2304 to tilt anobject, such as a lens carriage 2306 in the direction of at least one oftwo axis.

Embodiments of SMA actuator including the two buckle actuators and acoupler, such as that illustrated in FIG. 23, can be coupled with anadditional buckle actuator and pairs of buckle actuators to achieve adesired stroke greater than that of the single SMA actuator.

FIG. 24 illustrates an exploded view of an SMA system including an SMAactuator including a buckle actuator with a laminate hammock accordingto an embodiment. As described herein, SMA systems, for someembodiments, are configured to be used in conjunction with one or morecamera lens elements as an auto-focusing drive. As illustrated in FIG.24, the SMA system includes a return spring 2403 configured, accordingto various embodiments, to move a lens carriage 2406 in the oppositedirection of the z-stroke direction when the tension in the SMA wires2408 is lowered as the SMA wire is de-actuated. The SMA system for someembodiments includes a housing 2409 configured to receive the returnspring 2403 and to act a slide bearing to guide the lens carriage in thez-stroke direction. The housing 2409 is also configured to be disposedon the buckle actuator 2402. The buckle actuator 2402 includes a slidebase 2401 similar to those described herein. The buckle actuator 2402includes buckle arms 2404 coupled with a hammock portion, such as alaminated hammock 2406 formed of a laminate. The buckle actuator 2402also includes a SMA wire attach structures such as a laminate formedcrimp connection 2412.

As illustrated in FIG. 24, the slide base 2401 is disposed on anoptional adaptor plate 2414. The adaptor plate is configured to mate theSMA system or the buckler actuator 2402 to another system, such as anOIS, additional SMA systems, or other components. FIG. 25 illustrates anSMA system 2501 including an SMA actuator including a buckle actuator2402 with a laminate hammock according to an embodiment.

FIG. 26 illustrates a buckle actuator including a laminate hammockaccording to an embodiment. The buckle actuator 2402 includes bucklearms 2404. The buckle arms 2404 are configured to move in the z-axiswhen the SMA wires 2412 are actuated and de-actuated as describedherein. The SMA wires 2408 are attached to the buckle actuator usinglaminate formed crimp connections 2412. According to the embodimentillustrated in FIG. 26, the buckle arms 2404 are coupled with each otherthrough a center portion such as a laminate hammock 2406. A laminatehammock 2406, according to various embodiments, is configured to cradlea portion of an object that is acted upon by the buckle actuator, forexample a lens carriage that is moved by the buckle actuator usingtechniques including those described herein.

FIG. 27 illustrates a laminate hammock of an SMA actuator according toan embodiment. For some embodiments, the laminate hammock 2406 materialis a low stiffness material so it does not resist the actuation motion.For example, the laminate hammock 2406 is formed using a copper layerdisposed on a first polyimide layer with a second polyimide layerdisposed on the copper. For some embodiments, the laminate hammock 2406is formed on buckle arms 2404 using deposition and etching techniquesincluding those known in the art. For other embodiments, the laminatehammock 2406 is formed separately from the buckle arms 2404 and attachedto the buckle arms 2404 using techniques including welding, adhesive,and other techniques known in the art. For various embodiments, glue orother adhesive is used on the laminate hammock 2406 to ensure thebuckler arms 2404 stay in a position relative to a lens carriage.

FIG. 28 illustrates a laminate formed crimp connection of an SMAactuator according to an embodiment. The laminate formed crimpconnection 2412 is configured to attach an SMA wire 2408 to the buckleactuator and to create an electrical circuit joint with the SMA wire2408. For various embodiments, the laminated formed crimp connection2412 includes a laminate formed of one or more layers of an insulatorand one or more layers of a conductive layer formed on a crimp.

For example, a polyimide layer is disposed on at least a portion of thestainless steel portion forming a crimp 2413. A conductive layer, suchas copper, is then disposed on the polyimide layer, which iselectrically coupled with one or more signal traces 2415 disposed on thebuckle actuator. Deforming the crimp to come in to contact with the SMAwire therein also puts the SMA wire in electrical contact with theconductive layer. Thus, the conductive layer coupled with the one ormore signal traces is used to apply power signals to the SMA wire usingtechniques including those described herein. For some embodiments, asecond polyimide layer is formed over the conductive layer in areaswhere the conductive layer will not come into contact with the SMA wire.For some embodiments, the laminated formed crimp connection 2412 isformed on a crimp 2413 using deposition and etching techniques includingthose known in the art. For other embodiments, laminated formed crimpconnection 2412 and the one or more electrical traces are formedseparately from the crimp 2413 and the buckle actuator and attached tothe crimp 2412 and the buckle actuator using techniques includingwelding, adhesive, and other techniques known in the art.

FIG. 29 illustrates an SMA actuator including a buckle actuator with alaminate hammock. As illustrated in FIG. 29, when a power signal isapplied the SMA wire contracts or shortens to move the buckle arms andthe laminate hammock in the positive z-direction. The laminate hammockthat is in contact with an object in turn moves that object, such as alens carriage in the positive z-direction. When the power signal isdecreased or removed the SMA wire lengthens and moving the buckle armsand the laminate hammock in a negative z-direction.

FIG. 30 illustrates an exploded view of an SMA system including an SMAactuator including a buckle actuator according to an embodiment. Asdescribed herein, SMA systems, for some embodiments, are configured tobe used in conjunction with one or more camera lens elements as anauto-focusing drive. As illustrated in FIG. 30, the SMA system includesa return spring 3003 configured, according to various embodiments, tomove a lens carriage 3005 in the opposite direction of the z-strokedirection when the tension in the SMA wires 3008 is lowered as the SMAwire is de-actuated. The SMA system, for some embodiments, includes astiffner 3000 disposed on the return spring 3003. The SMA system forsome embodiments includes a housing 3009 formed of two portionsconfigured to receive the return spring 3003 and to act a slide bearingto guide the lens carriage in the z-stroke direction. The housing 3009is also configured to be disposed on the buckle actuator 3002. Thebuckle actuator 3002 includes a slide base 3001 similar to thosedescribed herein is formed of two portions. The slide base 3001 is splitto electrically isolate the 2 sides (for example 1 side is ground, otherside is power) because, according to some embodiments, current flows tothe wire through the slide base 3001 portions.

The buckle actuator 3002 includes buckle arms 3004. Each pair of buckleactuators 3002 are formed on a separate portion of the buckle actuator3002. The buckle actuator 3002 also includes a SMA wire attachstructures such as a resistance weld wire crimp 3012. The SMA systemoptionally includes a flex circuit 3020 for electrically coupling theSMA wires 3008 to one or more control circuits.

As illustrated in FIG. 30, the slide base 3001 is disposed on anoptional adaptor plate 3014. The adaptor plate is configured to mate theSMA system or the buckler actuator 3002 to another system, such as anOIS, additional SMA systems, or other components. FIG. 31 illustrates anSMA system 3101 including an SMA actuator including a buckle actuator3002 according to an embodiment.

FIG. 32 including an SMA actuator including a buckle actuator accordingto an embodiment. The buckle actuator 3002 includes buckle arms 3004.The buckle arms 3004 are configured to move in the z-axis when the SMAwires 3012 are actuated and de-actuated as described herein. The SMAwires 2408 are attached to the resistant weld wire crimps 3012.According to the embodiment illustrated in FIG. 32, the buckle arms 3004are configured to mate with an object, such as a lens carriage, withouta center portion using a two yoke capture joint.

FIG. 33 illustrates a two yoke capture joint of a pair of buckle arms ofan SMA actuator according to an embodiment. FIG. 33 also illustratesplating pads used to attached the optional flex circuit to the slidingbase. For some embodiments, the plating pads are formed using gold. FIG.34 illustrates a resistance weld crimp for an SMA actuator according toan embodiment used to attach an SMA wire to the buckle actuator. Forsome embodiments, glue or adhesive can also be placed on top of the weldto aid in mechanical strength and work as a fatigue strain relief duringoperation and shock loading.

FIG. 35 illustrates an SMA actuator including a buckle actuator with atwo yoke capture joint. As illustrated in FIG. 35, when a power signalis applied the SMA wire contracts or shortens to move the buckle arms inthe positive z-direction. The two yoke capture joint is in contact withan object in turn moves that object, such as a lens carriage in thepositive z-direction. When the power signal is decreased or removed theSMA wire lengthens and moving the buckle arms in a negative z-direction.The yoke capture feature ensures buckle arms stay in correct positionrelative to the lens carriage.

FIG. 36 illustrates a SMA bimorph liquid lens according to anembodiment. The SMA bimorph liquid lens 3501 includes a liquid lenssubassembly 3502, a housing 3504, and a circuit with SMA actuators 3506.For various embodiments, the SMA actuators include 4 bimorph actuators3508, such as embodiments described herein. The bimorph actuators 3508are configured to push on a shaping ring 3510 located on a flexiblemembrane 3512. The ring warps the membrane 3512/liquid 3514 changing thelight path through the membrane 3512/liquid 3514. A liquid contain ring3516 is used to contain the liquid 3514 between the membrane 3512 andthe lens 3518. Equal force from Bimorph actuators changes the focuspoint of the image in the Z direction (normal to lens) which allows itto work as an auto focus. Differential force from Bimorph actuators 3508can move light rays in the X,Y axes directions which allows it to workas an optical image stabilizer according to some embodiments. Both OISand AF functions could be achieved at the same time with proper controlsto each actuator. For some embodiments, a 3 actuators are used. Thecircuit with SMA actuators 3506 includes one or more contacts 3520 forcontrol signals to actuate the SMA actuators. According to someembodiments including 4 SMA actuators the circuit with SMA actuators3506 includes 4 power circuit control contact for each SMA actuator anda common return contact.

FIG. 37 illustrates a perspective SMA bimorph liquid lens according toan embodiment. FIG. 38 illustrates a cross-section and a bottom view ofSMA bimorph liquid lens according to an embodiment.

FIG. 39 illustrates an SMA system including an SMA actuator 3902 withbimorph actuators according to an embodiment. The SMA actuator 3902includes 4 bimorph actuators using techniques described herein. Two ofthe bimorph actuators are configured as positive z-stroke actuators 3904and two are configured as negative z-stroke actuators 3906 asillustrated in FIG. 40, which illustrates the SMA actuator 3902 withbimorph actuators according to an embodiment. The opposing actuators3906, 3904 are configured to control motion in both directions over theentire stroke range. This provides the ability to tune control code tocompensate for tilt. For various embodiments, two SMA wires 3908attached to top of component enable the positive z-stroke displacement.Two SMA wires attached to a bottom of component enable the negativez-stroke displacement. For some embodiments, each bimorph actuators areattached to an object, such as a lens carriage 3910, using tabs toengage the object. The SMA system includes a top spring 3912 configuredto provide stability of the lens carriage 3910 in axes perpendicular tothe z-stroke axis, for example in the direction of the x axis and the yaxis. Further, a top spacer 3914 is configured to be arranged betweenthe top spring 3912 and the SMA actuator 3902. A bottom spacer 3916 isarranged between the SMA actuator 3902 and a bottom spring 3918. Thebottom spring 3918 is configured to provide stability of the lenscarriage 3910 in axes perpendicular to the z-stroke axis, for example inthe direction of the x axis and the y axis. The bottom spring 3918 isconfigured to be disposed on a base 3920, such as those describedherein.

FIG. 41 illustrates the length 4102 of a bimorph actuator 4103 and thelocation of a bonding pad 4104 for an SMA wire 4206 to extend the wirelength beyond the bimorph actuator. Longer wire than bimorph actuator isused to increased stroke & force. Thus, the extension length 4108 ofthat the SMA wire 4206 beyond the bimorph actuator 4103 is used to setthe stroke and force for the bimorph actuator 4103.

FIG. 42 illustrates an exploded view of an SMA system including a SMAbimorph actuator 4202 according to an embodiment. The SMA system,according to various embodiments, is configured to use separate metalmaterials and non-conductive adhesives to create one or more electricalcircuits to power the SMA wires independently. Some embodiments have noAF size impact and include 4 bimorph actuators, such as those describedherein. Two of the bimorph actuators are configured as positive z strokeactuators and two negative z stroke actuators. FIG. 43 illustrates anexploded view of a subsection of the SMA actuator according to anembodiment. The subsection includes a negative actuator signalconnection 4302, a base 4304 with bimorph actuators 4306. The negativeactuator signal connection 4302 includes a wire bond pad 4308 forconnecting an SMA wire of a bimorph actuator 4306 using techniquesincluding those described herein. The negative actuator signalconnection 4302 is affixed to the base 4304 using an adhesive layer4310. The subsection also includes a positive actuator signal connection4314 with a wire bond pad 4316 for connecting an SMA wire 4312 of abimorph actuator 4306 using techniques including those described herein.The positive actuator signal connection 4314 is affixed to the base 4304using an adhesive layer 4318. Each of the base 4304, the negativeactuator signal connection 4302, and the positive actuator signalconnection 4314 are formed of metal, for example stainless steel.Connection pads 4322 on each of the base 4304, the negative actuatorsignal connection 4302, and the positive actuator signal connection 4314are configured to electrically couple control signals and ground foractuating the bimorph actuator 4306 using techniques including thosedescribed herein. For some embodiments, the connection pads 4322 aregold plated. FIG. 44 illustrates a subsection of the SMA actuatoraccording to an embodiment. For some embodiments, gold platted pads areformed on the stainless steel layer for solder bonding or other knownelectrical termination methods. Further, formed wire bond pads are usedfor signal joints to electrically couple the SMA wires for powersignals.

FIG. 45 illustrates a 5 axis sensor shift system according to anembodiment. The 5 axis sensor shift system is configured to move anobject, such as an image sensor in 5 axis relative to one or more lens.This includes X/Y/Z axis translation and pitch/roll tilt. Optionally thesystem is configured to use only 4 axis with X/Y axis translation andpitch/roll tilt together with a separate AF on top to do Z motion. Otherembodiments include the 5 axis sensor shift system configured to moveone or more lens relative to an image sensor. Static lens stack mountedon top cover and inserts inside the ID (not touching the orange movingcarriage inside) for some embodiments.

FIG. 46 illustrates an exploded view of a 5 axis sensor shift systemaccording to an embodiment. The 5 axis sensor shift system includes 2circuit components: a flexible sensor circuit 4602, bimorph actuatorcircuit 4604; and 8-12 bimorph actuators 4606 built on to the bimorphcircuit component using techniques including those described herein. The5 axis sensor shift system includes a moving carriage 4608 configured tohold one or more lenses and an outer housing 4610. The bimorph actuatorcircuit 4604 includes, according to an embodiment, includes 8-12 SMAactuators such as those described herein. The SMA actuators areconfigured to move the moving carriage 4608 in 5 axis, such as in anx-direction, a y-direction, a z-direction, pitch, and roll similar toother 5 axis systems described herein.

FIG. 47 illustrates an SMA actuator including bimorph actuatorsintegrated into this circuit for all motion according to an embodiment.Embodiment of a SMA actuator can including 8-12 bimorph actuators 4606.However, other embodiments could include more or less. FIG. 48illustrates an SMA actuator 4802 including bimorph actuators integratedinto this circuit for all motion according to an embodiment partiallyformed to fit inside a corresponding outer housing 4804. FIG. 49illustrates a cross section of a 5 axis sensor shift system according toan embodiment.

FIG. 50 illustrates an SMA actuator 5002 according to an embodimentincluding bimorph actuators. The SMA actuator 5002 is configured to use4 side mounted SMA bimorph actuators 5004 to move an image sensor, lens,or other various payloads in the x and y direction. FIG. 51 illustratesa top view of an SMA actuator including bimorph actuators that moved animage sensor, lens, or other various payloads in different x and ypositions.

FIG. 52 illustrates an SMA actuator including bimorph actuators 5202according to an embodiment configured as a box bimorph autofocus. Fourtop and bottom mounted SMA bimorph actuators, such as those describedherein, are configured to move together to create movement in thez-stroke direction for autofocus motion. FIG. 53 illustrates an SMAactuator including bimorph actuators according to an embodiment andwhich two top mounted bimorph actuators 5302 are configured to push downon one or more lens. FIG. 54 illustrates an SMA actuator includingbimorph actuators according to an embodiment and which two bottommounted bimorph actuators 5402 are configured to push up on one or morelens. FIG. 55 illustrates an SMA actuator including bimorph actuatorsaccording to an embodiment to show the four top and bottom mounted SMAbimorph actuators 5502, such as those described herein, are used to movethe one or more lens to create tilt motion.

FIG. 56 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators configured as a two axis lensshift OIS. For some embodiments, the two axis lens shift OIS isconfigured to move a lens in the X/Y axis. For some embodiments, Z axismovement comes from a separate AF, such as those described herein. 4bimorph actuators push on sides of auto focus for OIS motion. FIG. 57illustrates an exploded view of SMA system including a SMA actuator 5802according to an embodiment including bimorph actuators 5806 configuredas a two axis lens shift OIS. FIG. 58 illustrates a cross-section of SMAsystem including a SMA actuator 5802 according to an embodimentincluding bimorph actuators 5806 configured as a two axis lens shiftOIS. FIG. 59 illustrates box bimorph actuator 5802 according to anembodiment for use in a SMA system configured as a two axis lens shiftOIS as manufactured before it is shaped to fit in the system. Such asystem can be configured to have high OIS stroke OIS (e.g., +/−200 um ormore). Further, such embodiments are configured to have a broad range ofmotion and good OIS dynamic tilt using 4 slide bearings, such as POMslide bearings. The embodiments are configured to integrate easily withAF designs (e.g., VCM or SMA).

FIG. 60 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators configured as a five axis lensshift OIS and autofocus. For some embodiments, the five axis lens shiftOIS and autofocus is configured to move a lens in the X/Y/Z axis. Forsome embodiments, pitch and yaw axis motion are for dynamic tilt tuningcapability. 8 bimorph actuators are used to provide the motion for theauto focus and OIS using techniques described herein. FIG. 61illustrates an exploded view of SMA system including a SMA actuator 6202according to an embodiment including bimorph actuators 6204 according toan embodiment configured as a five axis lens shift OIS and autofocus.FIG. 62 illustrates a cross-section of SMA system including a SMAactuator 6202 according to an embodiment including bimorph actuators6204 configured as a five axis lens shift OIS and autofocus. FIG. 63illustrates box bimorph actuator 6202 according to an embodiment for usein a SMA system configured as a five axis lens shift OIS and autofocusas manufactured before it is shaped to fit in the system. Such a systemcan be configured to have high OIS stroke OIS (e.g., +/−200 um or more)and a high autofocus stroke (e.g., 400 um or more). Further, suchembodiments enable to tune out any tilt and remove the need for aseparate autofocus assembly.

FIG. 64 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators configured as an outwardpushing box. For some embodiments, the bimorph actuators assembly isconfigured to wrap around an object, such as a lens carriage. Sincecircuit assembly is moving with the lens carriage, a flexible portionfor low X/Y/Z stiffness. Tail pads of the circuit are static. Theoutward pushing box can be configured for both 4 or 8 bimorph actuators.So, the outward pushing box can be configured as a 4 bimorph actuator onthe sides for OIS with movement in X and Y axis. The outward pushing boxcan be configured as a 4 bimorph actuator on the top and bottom forautofocus with movement in z axis. The outward pushing box can beconfigured as an 8 bimorph actuator on the top, bottom, and sides forOIS and autofocus with movement in x, y, and z axis and capable of3-axis tilt (pitch/roll/yaw). FIG. 65 illustrates an exploded view of aSMA system including a SMA actuator 6602 according to an embodimentincluding bimorph actuators 6604 configured as an outward pushing box.Thus, the SMA actuator is configured such that the bimorph actuators acton the outer housing 6504 to move the lens carriage 6506 usingtechniques described herein. FIG. 66 illustrates a SMA system includinga SMA actuator 6602 according to an embodiment including bimorphactuators configured as an outward pushing box partially shaped toreceive a lens carriage 6604. FIG. 67 illustrates a SMA system includinga SMA actuator 6602 including bimorph actuators 6604 according to anembodiment configured as an outward pushing box as manufactured beforeit is shaped to fit in the system.

FIG. 68 illustrates a SMA system including a SMA actuator 6802 accordingto an embodiment including bimorph actuators configured as a three axissensor shift OIS. For some embodiments, z axis movement comes from aseparate autofocus system. 4 bimorph actuators configured to push onsides of a sensor carriage 6804 to provide the motion for the OIS usingtechniques described herein. FIG. 69 illustrates an exploded view of SMAincluding a SMA actuator 6802 according to an embodiment includingbimorph actuators configured as a three axis sensor shift OIS. FIG. 70illustrates a cross-section of SMA system including a SMA actuator 6802according to an embodiment including bimorph actuators 6806 configuredas a three axis sensor shift OIS. FIG. 71 illustrates a box bimorphactuator 6802 component according to an embodiment for use in a SMAsystem configured as a three axis sensor shift OIS as manufacturedbefore it is shaped to fit in the system. FIG. 72 illustrates a flexiblesensor circuit for use in a SMA system according to an embodimentconfigured as a three axis sensor shift OIS. Such a system can beconfigured to have high OIS stroke OIS (e.g., +/−200 um or more) and ahigh autofocus stroke (e.g., 400 um or more). Further, such embodimentsare configured to have a broad range of two axis motion and good OISdynamic tilt using 4 slide bearings, such as POM slide bearings. Theembodiments are configured to integrate easily with AF designs (e.g.,VCM or SMA).

FIG. 73 illustrates a SMA system including a SMA actuator 7302 accordingto an embodiment including bimorph actuators 7304 configured as a sixaxis sensor shift OIS and autofocus. For some embodiments, the six axissensor shift OIS and autofocus is configured to move a lens in theX/Y/Z/Pitch/Yaw/Roll axis. For some embodiments, pitch and yaw axismotion are for dynamic tilt tuning capability. 8 bimorph actuators areused to provide the motion for the auto focus and OIS using techniquesdescribed herein. FIG. 74 illustrates an exploded view of SMA systemincluding a SMA actuator 7402 according to an embodiment includingbimorph actuators 7404 configured as a six axis sensor shift OIS andautofocus. FIG. 75 illustrates a cross-section of SMA system including aSMA actuator 7402 according to an embodiment including bimorph actuatorsconfigured as a six axis sensor shift OIS and autofocus. FIG. 76illustrates box bimorph actuator 7402 according to an embodiment for usein a SMA system configured as a six axis sensor shift OIS and autofocusas manufactured before it is shaped to fit in the system. FIG. 77illustrates a flexible sensor circuit for use in a SMA system accordingto an embodiment configured as a three axis sensor shift OIS. Such asystem can be configured to have high OIS stroke OIS (e.g., +/−200 um ormore) and a high autofocus stroke (e.g., 400 um or more). Further, suchembodiments enable to tune out any tilt and remove the need for aseparate autofocus assembly.

FIG. 78 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators configured as a two axiscamera tilt OIS. For some embodiments, the two axis camera tilt OIS isconfigured to move a camera in the Pitch/Yaw axis. 4 bimorph actuatorsare used to push on top and bottom of autofocus for entire camera motionfor the OIS pitch and yaw motion using techniques described herein. FIG.79 illustrates an exploded view of SMA system including a SMA actuator7902 according to an embodiment including bimorph actuators 7904configured as two axis camera tilt OIS. FIG. 80 illustrates across-section of SMA system including a SMA actuator according to anembodiment including bimorph actuators configured as a two axis cameratilt OIS. FIG. 81 illustrates box bimorph actuator according to anembodiment for use in a SMA system configured as a two axis camera tiltOIS as manufactured before it is shaped to fit in the system. FIG. 82illustrates a flexible sensor circuit for use in a SMA system accordingto an embodiment configured as a two axis camera tilt OIS. Such a systemcan be configured to have high OIS stroke OIS (e.g., plus/minus 3degrees or more). The embodiments are configured to integrate easilywith autofocus (“AF”) designs (e.g., VCM or SMA).

FIG. 83 illustrates a SMA system including a SMA actuator according toan embodiment including bimorph actuators configured as a three axiscamera tilt OIS. For some embodiments, the two axis camera tilt OIS isconfigured to move a camera in the Pitch/Yaw/Roll axis. 4 bimorphactuators are used to push on top and bottom of autofocus for entirecamera motion for the OIS pitch and yaw motion using techniquesdescribed herein and 4 bimorph actuators are used to push on sides ofautofocus for entire camera motion for the OIS roll motion usingtechniques described herein. FIG. 84 illustrates an exploded view of SMAsystem including a SMA actuator 8402 according to an embodimentincluding bimorph actuators 8404 configured as three axis camera tiltOIS. FIG. 85 illustrates a cross-section of SMA system including a SMAactuator according to an embodiment including bimorph actuatorsconfigured as a three axis camera tilt OIS. FIG. 86 illustrates boxbimorph actuator for use in a SMA system according to an embodimentconfigured as a three axis camera tilt OIS as manufactured before it isshaped to fit in the system. FIG. 87 illustrates a flexible sensorcircuit for use in a SMA system according to an embodiment configured asa three axis camera tilt OIS. Such a system can be configured to havehigh OIS stroke OIS (e.g., plus/minus 3 degrees or more). Theembodiments are configured to integrate easily with AF designs (e.g.,VCM or SMA).

FIG. 88 illustrates exemplary dimensions for a bimorph actuator of anSMA actuator according to embodiments. The dimensions are preferredembodiments but one skilled in the art would understand that otherdimensions could be used based on desired characteristics for an SMAactuator.

It will be understood that terms such as “top,” “bottom,” “above,”“below,” and x-direction, y-direction, and z-direction as used herein asterms of convenience that denote the spatial relationships of partsrelative to each other rather than to any specific spatial orgravitational orientation. Thus, the terms are intended to encompass anassembly of component parts regardless of whether the assembly isoriented in the particular orientation shown in the drawings anddescribed in the specification, upside down from that orientation, orany other rotational variation.

It will be appreciated that the term “present invention” as used hereinshould not be construed to mean that only a single invention having asingle essential element or group of elements is presented. Similarly,it will also be appreciated that the term “present invention”encompasses a number of separate innovations, which can each beconsidered separate inventions. Although the present invention has beendescribed in detail with regards to the preferred embodiments anddrawings thereof, it should be apparent to those skilled in the art thatvarious adaptations and modifications of embodiments of the presentinvention may be accomplished without departing from the spirit and thescope of the invention. Additionally, the techniques described hereincould be used to make a device having two, three, four, five, six, ormore generally n number of bimorph actuators and buckle actuators.Accordingly, it is to be understood that the detailed description andthe accompanying drawings as set forth hereinabove are not intended tolimit the breadth of the present invention, which should be inferredonly from the following claims and their appropriately construed legalequivalents.

What is claimed is:
 1. An actuator including: a base; a plurality ofbuckle arms; and at least a first shape memory alloy wire coupled with apair of buckle arms of the plurality of buckle arms.
 2. The actuator ofclaim 1, wherein the pair of buckle arms of the plurality of buckle armsare coupled together with a center portion.
 3. The actuator of claim 2,wherein the pair of buckle arms are configured to move in a positivez-direction when the shape alloy wire is actuated.
 4. The actuator ofclaim 1, wherein a first end of the shape memory alloy wire is attachedto first buckle arm of the pair of buckle arms and a second end of theshape memory alloy wire is attached to a second buckle arm.
 5. Theactuator of claim 4, wherein the shape memory allow wire is attached tothe first buckle arm by a first crimp and is attached to the secondbuckle arm by a second crimp.
 6. The actuator of claim 2, wherein thecenter portion is configured to receive a portion of a lens carriage. 7.The actuator of claim 1 included in an autofocus system.
 8. The actuatorof claim 1 configured as a micro-fluidic pump.
 9. An autofocus systemincluding more than one actuator according to claim
 1. 10. Amicro-fluidic pump including more than one actuator according toclaim
 1. 11. An actuator including: a base; and at least one bimorphactuator including an shape memory alloy material, the bimorph actuatorattached to the base.
 12. The actuator of claim 11, wherein a first endof the shape memory alloy material is attached to a first end of thebimorph actuator and a second end is attached to a second end of thebimorph actuator.
 13. The actuator of claim 12, wherein the second endof the bimorph actuator is configured to move in a z-direction when theshape memory alloy material is actuated.
 14. The actuator of claim 11,wherein the shape memory alloy material is a shape memory allow wire.15. The actuator of claim 11, wherein the shape memory allow material isa shape memory allow ribbon.
 16. The actuator of claim 11 included in anautofocus system.
 17. The actuator of claim 11 configured as amicro-fluidic pump.
 18. An autofocus system including more than oneactuator according to claim
 11. 19. A micro-fluidic pump including morethan one actuator according to claim
 11. 20. An actuator comprising: abeam; a first end pad electrically coupled to the beam; a second end padelectrically coupled to the beam; a center feed arranged between thefirst end pad and the second end pad; and a shape memory alloy materialcoupled with the first end pad, the second end pad, and the center feed,the center feed configured to be electrically isolated from the beam andelectrically coupled to a contact layer.
 21. An actuator comprising: afirst buckle actuator; a second buckle actuator; and a lens carriage.22. The actuator of claim 21, wherein the first buckle actuator isconfigured to move the lens carriage in a negative z-direction.
 23. Theactuator of claim 22, wherein the second buckle actuator is configuredto move the lens carriage in a positive z-direction.
 24. The actuator ofclaim 21, wherein the first buckle actuator includes a first base andthe second buckle actuator includes a second base, the first buckleactuator includes a first pair of buckle arms and a second pair ofbuckle arms attached to the first base, the second buckle actuatorincludes a third pair of buckle arms and a fourth pair of buckle arms.25. The actuator of claim 24, wherein the lens carriage is arrangedbetween the first buckle actuator and the second buckle actuator. 26.The actuator of claim 25, wherein the first base and the second baseface toward each other.
 27. The actuator of claim 26, wherein the firstbuckle actuator and the second buckle actuator are configured to tiltthe lens carriage with respect to an axis.
 28. The actuator of claim 2,wherein the center portion is a laminated hammock.
 29. A liquid lenscomprising: a circuit including at least one shape memory alloyactuator; a shaping ring; a flexible membrane; a lens, and a liquidretaining ring, the lens configured on a side of the liquid retainingring opposite the flexible membrane, the liquid retaining ringconfigured to retain liquid between the lens and the membrane, the shapememory alloy actuator configured to push the shaping ring located on theflexible membrane to change the shape of the membrane to shape theliquid.
 30. The liquid lens of claim 29, wherein the shape memory alloyactuator includes a shape memory alloy wire.
 31. The liquid lens ofclaim 29, wherein the shape memory alloy includes a shape memory alloyribbon.
 32. The actuator of claim 11 including at least four bimorphactuators, two of the bimorph actuators configured to move an object ina negative z-direction and two of the bimorph actuators configured tomove an object in a positive z-direction.
 33. The actuator of claim 11including at least 8 bimorph actuators, the 8 bimorph actuatorsconfigured to move an object in a direction of 5 axis.
 34. The actuatorof claim 33 including 12 bimorph actuators.
 35. The actuator of claim 33including 4 side mounted bimorph actuators to move the object in an xdirection and a y direction.
 36. The actuator of claim 33 configured asa box bimorph autofocus.
 37. The actuator of claim 35 including 2 topmounted bimorph actuators and 2 bottom mounted bimorph actuators. 38.The actuator of claim 35 including 4 top mounted bimorph actuators and 4bottom mounted bimorph actuators.
 39. The actuator of claim 11 includingat least four bimorph actuators, two of the bimorph actuators configuredto move an object in a x-direction and two of the bimorph actuatorsconfigured to move an object in a y-direction.